SCT Veeco’s new integrated MBE and ALD system chosen for hybrid GaN deposition research
Posted: Thu Oct 13, 2022 9:38 am
Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has received an order from Justus Liebig University Giessen (University of Giessen) in Germany for an integrated GENxplor R&D molecular beam epitaxy (MBE) and Fiji atomic layer deposition (ALD) system...
Source: https://www.semiconductor-today.com/new ... 1022.shtml
Source: https://www.semiconductor-today.com/new ... 1022.shtml